SCOPUS 정보 검색 플랫폼

Volumn 318, Issue 1-2, 1998, Pages 120-123

Atomic scale characterization of semiconductors by in-situ real time spectroscopic ellipsometry

a SOPRA (France)

Author keywords

Photointensifier; Real time spectroscopic ellipsometer

Indexed keywords

ANNEALING; IMAGE INTENSIFIERS (ELECTRON TUBE); LASER APPLICATIONS; LIQUID CRYSTAL DISPLAYS; REAL TIME SYSTEMS; SEMICONDUCTOR MATERIALS;

REAL TIME SPECTROSCOPIC ELLIPSOMETER (RTSE);

ELLIPSOMETRY;

EID: 0347657261 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(97)01149-8 Document Type: Article

Times cited : (1)

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