Preparation of PbZrO3 thin films by plasma enhanced metalorganic chemical vapor deposition

Journal of Materials Science Letters

Volumn 22, Issue 23, 2003, Pages 1677-1678

  Lee, Won Gyu ^a   Woo, Seong Ihl ^b,c  

^a Kangwon National University   (South Korea)

^b Department of Chemical Engineering   (South Korea)

^c Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL STRUCTURE; CRYSTALLIZATION; ELECTRODES; ENERGY DISPERSIVE SPECTROSCOPY; LEAD COMPOUNDS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OXIDATION; PEROVSKITE; PHASE TRANSITIONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PYROLYSIS; X RAY DIFFRACTION ANALYSIS; X RAY SPECTROSCOPY;

PLASMA CHEMISTRY; WAVELENGTH DISPERSION X-RAY SPECTROSCOPY (WDX);

THIN FILMS;

EID: 0347592392     PISSN: 02618028     EISSN: None     Source Type: Journal    
DOI: 10.1023/B:JMSL.0000004646.73243.16     Document Type: Article

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