Oriented single phase PbZrO3 thin films on Si(100) substrate using aqueous sol with rapid thermal annealing

Materials Letters

Volumn 33, Issue 1-2, 1997, Pages 1-5

  Palkar, V R ^a   Chattopadhyay, S ^a   Purandare, S C ^a   Lokhre, S G ^a   Pinto, R ^a   Multani, M S ^a  

^a TATA INSTITUTE OF FUNDAMENTAL RESEARCH   (India)

Author keywords

Aqueous sol synthesis process; Atomic force microscopy; Ferroelectric nature; Lead zirconate; PbZrO3; Rapid thermal annealing; Spin coating; Thin films

Indexed keywords

ANNEALING; CRYSTAL DEFECTS; CRYSTAL ORIENTATION; DEPOSITION; ELECTRIC FIELD EFFECTS; FERROELECTRIC MATERIALS; LEAD COMPOUNDS; SEMICONDUCTING SILICON; SOLS; SUBSTRATES; SYNTHESIS (CHEMICAL); THIN FILMS;

LEAD ZIRCONATE; SPIN COATING;

DIELECTRIC FILMS;

EID: 0031268662     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-577X(97)00071-2     Document Type: Article

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