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Volumn 766, Issue , 2003, Pages 191-195
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Advanced characterization of ultra-low-k periodic porous silica films - Pore size distribution, pore-diameter anisotropy, and size and macroscopic isotropy of domain structure
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Author keywords
[No Author keywords available]
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Indexed keywords
ANISOTROPY;
CHARACTERIZATION;
CRYSTAL STRUCTURE;
OPTICAL VARIABLES MEASUREMENT;
PORE SIZE;
POROUS MATERIALS;
SILICA;
TRANSMISSION ELECTRON MICROSCOPY;
X RAY SCATTERING;
MACROSCOPIC ISOTROPY;
PORE DIAMETER ANISOTROPY;
POROUS SILICA FILMS;
X RAY REFLECTANCE MEASUREMENT;
THIN FILMS;
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EID: 0347569412
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-766-e9.6 Document Type: Conference Paper |
Times cited : (4)
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References (9)
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