Effect of surface roughness on gaseous flow through microchannels

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 2000-T, Issue , 2000, Pages 291-298

  Turner, Stephen E ^a   Sun, Hongwei ^b   Faghr, Mohammad ^b   Gregory, Otto J ^b  

^a NAVAL UNDERSEA WARFARE CENTER   (United States)

^b The University of Rhode Island   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; FRICTION; LAMINAR FLOW; PHOTOLITHOGRAPHY; REYNOLDS NUMBER; SURFACE ROUGHNESS; TRIBOLOGY;

CORRUGATED SURFACES; DEVELOPED REGIONS; EXPERIMENTAL INVESTIGATIONS; FLOWTHROUGH; FRICTION FACTORS; HELIUM FLOW; HYDRAULIC DIAMETER; NITROGEN FLOW; PHOTOLITHOGRAPHIC PROCESS; REYNOLD NUMBER;

MICROCHANNELS;

EID: 0347543576     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2000-1447     Document Type: Conference Paper

References (13)

1. Tuckerman, D. B., And Pease, R. F. W., 1981, "High-Performance Heat Sinking For VLSI," Ieee Electron Device Letters, Vol. EDL-2, No. 5, pp.126-129.
2. Peiyi, W., and Little, W. H 1983, "Measurement Of Friction Factors For The Flow Of Gases In Very Fine Channels Used For Microminiature Joule-Thompson Refrigerators," Cryogenics, pp. 273-277.
3. Pfahler, J., Harley, J., Bau, H., Zemel, J. N., 1991, "Gas And Liquid Flow In Small Channels," Proceedings of ASME Winter Annual Meeting, Micromechanical Sensors, Actuators, and Systems, DSC-Vol. 32, pp. 49-60.
4. Choi, S. B., Barron, R. F., and Warrington, R. O., 1991, "Fluid Flow And Heat Transfer In Microtubes," Micromechanical Sensor, Actuators, and Systems, ASME DSC-Vol. 32, pp. 123-134.
5. Peng, X.F., and Peterson, G.P., 1996, "Convective Heat Transfer and Flow Friction for Water Flow in Microchannel Structures," International Journal of Heat and Mass Transfer, Vol. 39, No. 12, pp. 2599-2608.
6. Harley, J.C., Huang, Y., Bau, H., Zemel, J., 1995, "Gas Flow in Micro-Channels," Journal of Fluid Mechanics, Vol. 284, pp. 257-274.
7. Shih, J.C., Ho, C.M. Liu, J., Tai, Y.C., 1996, "Monotomic and Polyatomic Gas Flow Through Uniform Microchannels," ASME, Microelectromechanical Systems (MEMS), DSC-Vol. 59, pp. 197-203.
8. Pfund, D., Shekarriz, A., Popescu, A., and Welty, J., 1998, "Pressure Drop Measurements in a Microchannel," ASME Micro-Electro-Mechanical Systems (MEMS), DSC-Vol. 66, pp 193-198.
9. Kays, W.M., 1966, "Convective Heat and Mass Transfer," McGraw-Hill Book Company, pp 53-59.
10. Turner, S., Sun, H., Faghri, M., Gregory, 0., 1999, "Local Pressure Measurement of Gaseous Flow Through Microchannels," ASME Proceedings International Mechanical Engineering Congress and Exposition (IMECE), November 15-20, Nashville, TN, HTD-Vol 364-3, pp. 71-79.
11. Choquette, S. F., Faghri, M., Kenyon, E. J., Sunden, B., 1996, "Compressible Fluid Flow In Micron Sized Channels," ASME National Heat Transfer Conference, HTD-Vol. 327, pp. 25-32.
12. Shah, R. K., and London, A. L.,1978, "Laminar Flow Forced Convection In Ducts," Advances in Heat Transfer, Academic Press, New York.
13. Abemethy, R. B., Benedict, R. P., and Dowdell, R. B., 1985, "ASME Measurement Uncertainty," ASME Journal of Fluids Engineering, Vol. 107, pp. 161-164.