Local pressure measurement of gaseous flow through microchannels

American Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD

Volumn 364-3, Issue , 1999, Pages 71-79

  Turner, Stephen E ^a   Sun, Hongwei ^a   Faghri, Mohammad ^a   Gregory, Otto J ^a  

^a University of Rhode Island   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLUID DYNAMICS; HELIUM; NITROGEN; PRESSURE MEASUREMENT; REYNOLDS NUMBER; SILICON;

FRICTION FACTOR; KNUDSEN NUMBER; PRESSURE DISTRIBUTIONS;

FLOW OF FLUIDS;

EID: 7244224709     PISSN: 02725673     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

1. Abernethy, R. B., Benedict, R. P., and Dowdell, R. B., 1985, "ASME Measurement Uncertainty," ASME Journal of Fluids Engineering, Vol. 107, pp. 161-164.
2. Choi, S. B., Barron, R. F., and Warrington, R. O., 1991, "Fluid Flow And Heat Transfer In Microtubes," Micromechanical Sensor, Actuators, and Systems, ASME DSC-Vol. 32, pp. 123-134.
3. Choquette, S. F., Faghri, M., Kenyon, E. J., Sunden, B., 1996, "Compressible Fluid Flow In Micron Sized Channels," ASME National Heat Transfer Conference, HTD-Vol. 327, pp. 25-32.
4. Estermann, I., 1955, Thermodynamics and Physics of Matter, Princeton University Press, Vol. 1, pp. 737-739.
5. Harley, J.C., Huang, Y., Bau, H., Zemel, J., 1995, "Gas Flow in Micro-Channels," Journal of Fluid Mechanics, Vol. 284, pp. 257-274.
6. Kavehpour, H. P., Faghri, M., and Asako, Y., 1997, "Effects Of Compressibility And Rarefaction On Gaseous Flows In Microchannels," Numerical Heat Transfer, Part A, 32:677-696.
7. Mirza, A.R. and Ayon, A.A., 1998, "Silicon Wafer Bonding: Key To MEMS High-Volume Manufacturing," Sensors, December, pp. 24-33.
8. Peiyi, W., and Little, W. H., 1983, "Measurement Of Friction Factors For The Flow Of Gases In Very Fine Channels Used For Microminiature Joule-Thompson Refrigerators," Cryogenics, pp. 273-277.
9. Peng, X. F., Peterson, G. P., and Wang, B. X., 1994, "Frictional Flow Characteristics Of Water Flowing Through Rectangular Microchannels," Experimental Heat Transfer, Vol. 7, pp. 249-264.
10. Pfahler, J., Harley, J., Bau, H., Zemel, J. N., 1991, "Gas And Liquid Flow In Small Channels," Proceedings of ASME Winter Annual Meeting, Micromechanical Sensors, Actuators, and Systems, DSC-Vol. 32, pp. 49-60.
11. Shah, R. K., and London, A. L., 1978, "Laminar Flow Forced Convection In Ducts," Advances in Heat Transfer, Academic Press, New York.
12. Shapiro, A.M., 1953, The Dynamics and Thermodynamics of Compressible Fluid Flow, The Ronald Press Company, New York, Vol. 1, pp. 178-183.
13. Shih, J.C., Ho, C.M. Liu, J., Tai, Y.C., 1996, "Monotomic and Polyatomic Gas Flow Through Uniform Microchannels," ASME, Microelectromechanical Systems (MEMS), DSC-Vol. 59, pp. 197-203.