Effects of plasma on excimer lamp based selective activation processes for electroless plating

Applied Surface Science

Volumn 138-139, Issue 1-4, 1999, Pages 62-67

  Macauley, D J ^a   Kelly, P V ^a   Mongey, K F ^a   Crean, G M ^a  

^a UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

Film growth and epitaxy; Methods of deposition of films and coatings; Photochemistry and radiation chemistry; Plasma reactions (including flowing afterglow and electric discharges)

Indexed keywords

EID: 0347359212     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00496-6     Document Type: Article

References (9)

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9. D.J. Macauley. P.V. Kelly, K.F. Mongey, G.M. Crean, Paper G49, this symposium.