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Volumn 8, Issue 8-9, 1999, Pages 1414-1417
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The effect of ion bombardment on the nucleation of CVD diamond
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Author keywords
Diamond films; Interface; Ion bombardment; Nucleation
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
HYDROCARBONS;
HYDROGEN;
INTERFACES (MATERIALS);
ION BOMBARDMENT;
NANOSTRUCTURED MATERIALS;
NUCLEATION;
SEMICONDUCTING SILICON;
BIAS ENHANCED NUCLEATION;
HOT FILAMENT CHEMICAL VAPOR DEPOSITION;
TWO STEP PROCESS;
DIAMOND FILMS;
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EID: 0347175992
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/s0925-9635(99)00012-6 Document Type: Article |
Times cited : (6)
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References (15)
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