Hybrid integration of light emitters and detectors with SOI based Micro-Opto-Electro-Mechanical Systems (MOEMS)

Proceedings of SPIE- The International Society for Optical Engineering

Volumn 4293, Issue , 2001, Pages 32-45

  Kubby, J ^a   Calamita, J ^a   Chang, J ^a   Chen, J ^a   Gulvin, P ^a   Lin, C C ^a   Lofthus, R ^a   Nowak, B ^a   Su, Y ^a   Tran, A ^a   Burns, D ^a   Bryzek, J ^a   Gilbeart, J ^a   Hsu, C ^a   Korsmeyer, T ^a   Morris, A ^a   Plowman, T ^a   Rabinovich, V ^a   Daiber, T ^a   Scharf, B ^a   Zosel, A ^a   Fan, L ^a   Hartman, J ^a   Husain, A ^a   Golubovic Liakopoulos, N ^a   Mali, R ^a   Pumo, T ^a   Delvecchio, S ^a   Zhou, S ^a   Rosa, M ^a   Sun, D ^a   more..

^a XEROX CORPORATION   (United States)

Author keywords

Hybrid Integration; Micro Opto Electro Mechanical Systems; MOEMS; Monolithic Integration; Optical Modeling; Package Modeling; Silicon Optical Bench; Silicon on Insulator; SOI

Indexed keywords

COMPUTER SIMULATION; CRYSTAL MICROSTRUCTURE; FLIP CHIP DEVICES; LIGHT EMISSION; MATHEMATICAL MODELS; MICROMACHINING; MICROOPTICS; OPTICAL SWITCHES; PHOTODETECTORS; POLYSILICON; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SINGLE CRYSTALS;

MICRO-OPTO-ELECTRO-MECHANICAL SYSTEMS (MOEMS); SINGLE-CRYSTAL-SILICON (SCS);

MICROELECTROMECHANICAL DEVICES;

EID: 0347147039     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.426941     Document Type: Article

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