X-ray topography and diffraction studies of misfit dislocation nucleation in Si-based structures

Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences

Volumn 357, Issue 1761, 1999, Pages 2777-2788

  Goorsky, M S ^a   Feichtinger, P ^a   Fukuto, H ^a   U'Ren, G ^a  

^a Engineering IV   (United States)

Author keywords

High resolution X ray diffraction; Silicon heterostructures; Topography

Indexed keywords

EID: 0347138150     PISSN: 1364503X     EISSN: None     Source Type: Journal    
DOI: 10.1098/rsta.1999.0465     Document Type: Article

References (25)

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