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Volumn 340-342, Issue , 2003, Pages 509-513

The VO2* defect in silicon

Author keywords

Defects; LVMs; Silicon; Vacancy dioxygen

Indexed keywords

ABSORPTION SPECTROSCOPY; ANNEALING; CHEMICAL BONDS; DOPING (ADDITIVES); ELECTRON IRRADIATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INFRARED RADIATION; LATTICE VIBRATIONS; RELAXATION PROCESSES; SILICON COMPOUNDS; THERMAL EFFECTS;

EID: 0347134678     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physb.2003.09.146     Document Type: Conference Paper
Times cited : (48)

References (18)
  • 18
    • 0004019068 scopus 로고    scopus 로고
    • R. Jones (Ed.), Early Stages of Oxygen Precipitation in Silicon, High Technology, Kluwer, Dordrecht
    • L.I. Khirunenko, et al., in: R. Jones (Ed.), Early Stages of Oxygen Precipitation in Silicon, High Technology, NATO ASI Series, 3, Vol. 17, Kluwer, Dordrecht, 1996, pp. 403-409.
    • (1996) NATO ASI Series, 3 , vol.17 , pp. 403-409
    • Khirunenko, L.I.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.