Engineering sidewall angles of silica-on-silicon waveguides

Electronics Letters

Volumn 40, Issue 1, 2004, Pages 27-29

  Ou, Haiyan ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ETCHING; MICROMACHINING; MULTIPLEXING; OPTICAL COMMUNICATION; OPTICAL FIBERS; OPTIMIZATION; PHOTOLITHOGRAPHY; PHOTORESISTORS; PHOTORESISTS; SCANNING ELECTRON MICROSCOPY; SILICA; SILICON; SURFACE ROUGHNESS; SURFACE TENSION; THICKNESS MEASUREMENT;

ARRAYED WAVEGUIDE GRATINGS (AWG); MULTI-STAGE INTERFERENCE DEVICES;

WAVEGUIDES;

EID: 0347130857     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20040005     Document Type: Article

References (6)

1. Kawachi, M.: 'Silica waveguides on silicon and their application to integrated-optic components', Opt. Quantum Electron., 1990, 22, pp. 391-416
2. Okamoto, K.: 'Recent progress of integrated optics planar lightwave circuits', Opt. Quantum Electron., 1999, 31, pp. 107-129
3. Jones, J.A., and Cooper, K.: 'Hybrid integration onto silicon motherboards with planar silica waveguides', IEE Proc. Optoelectron., 1996, 43, (5), pp. 316-321
4. Ou, H.: 'Different index contrast silica-on-silicon waveguides by PECVD', Electron. Lett., 2003, 39, (2), pp. 212-213
5. Ou, H.: 'Reactive ion etching in silica-on-silicon planar waveguide technology'. ECIO'03, Prague, Czech Republic, ThPo22, pp. 281-284
6. Ou, H., and Hübner, J.: 'Silica-on-silicon waveguide fabrication', DOPSNYT, 2001, 2, pp. 39-41