Using a catalytic technique to abate PFC emissions in a 300-mm etch tool

MICRO

Volumn 19, Issue 3, 2001, Pages 89-101

  Cox, James ^a,b,c   Koenigseder, Sig ^d   Decker, Tim ^e  

^a Hitachi America   (United States)

^b LOUISIANA STATE UNIVERSITY   (United States)

^c TEXAS A AND M UNIVERSITY   (United States)

^d TEXAS STATE UNIVERSITY   (United States)

^e SEMATECH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0347033991     PISSN: 10810595     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)

1. J Van Compel, "PFCs in the Semiconductor Industry: A Primer," Semiconductor International 23, no. 8 (2000): 321-330.
2. CA Hoover, "Environmental Impact of PFC Abatement, Capture, and Recycle," SSA Journal 13, no. 3 (1999): 21-26.
3. L Beu et al., "Current State of Technology: Perfluorocompound (PFC) Emissions Reduction," Sematech Report 98053508A-TR (Austin, TX: Sematech, 1998).
4. 4 Abatement (ESHC02)," Sematech Report 97073319A-TR (Austin, TX: Sematech, 1997).
5. W Worth, "Further Evaluation of Two Plasma Technologies for PFC Emissions Reduction" (paper presented at the Semiconductor Safety Association 2000 Annual Conference, Arlington, VA, April 27, 2000).
6. V Vartanian et al., "Long-Term Evaluation of Litmas 'Blue' Plasma Device for Point-of-Use (POU) Perfluorocompound and Hydrofluorocarbon Abatement," Sematech Report 99123865A-ENG (Austin, TX: Sematech, 2000).
7. E Tonnis et al., "Evaluation of a Litmas 'Blue' Point-of-Use (POU) Plasma Abatement Device for Perfluorocompound (PFC) Destruction," Sematech Report 98123605A-ENG (Austin, TX: Sematech, 1998).
8. S Tamata, "Catalytic Destruction of PFCs" (paper presented at the Global Semiconductor Industry Conference on Perfluorocompound Emissions Control, Monterey, CA, April 8, 1998).