Pull system for control and dummy wafers

International Journal of Advanced Manufacturing Technology

Volumn 22, Issue 11-12, 2003, Pages 805-818

  Chen, H C ^a   Lee, C E C ^b  

^a CHIENKUO TECHNOLOGY UNIVERSITY   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Control wafers; Downgrading path; Dummy wafers; Inventory control; Pull system; Recycled usages

Indexed keywords

COATINGS; COST EFFECTIVENESS; GROWTH (MATERIALS); LIFE CYCLE; PHOTORESISTORS; PREVENTIVE MAINTENANCE; REFRACTIVE INDEX;

CONTROL WAFERS; MACHINE DELAY RATIO;

INVENTORY CONTROL;

EID: 0346907025     PISSN: 02683768     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00170-002-1531-8     Document Type: Article

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