Evaluation of Structural Reliability of MEMS Device in Digital Video Disk Systems

Metals and Materials International

Volumn 4, Issue 4, 1998, Pages 827-831

  Park, Byungwoo ^a   Bu, Jong Uk ^b   Kwon, Dongil ^a  

^a Seoul National University   (South Korea)

^b LG   (South Korea)

Author keywords

Annular shutter mirror; Digital video disk; Electrostatic force; Fatigue test; MEMS

Indexed keywords

DIGITAL DEVICES; DIGITAL STORAGE; ELECTROSTATIC DEVICES; ELECTROSTATIC FORCE; FATIGUE OF MATERIALS; FATIGUE TESTING; LASER BEAMS; MEMS; MIRRORS; MULTIMEDIA SYSTEMS; OPTICAL TESTING; RELIABILITY; THIN FILMS; VIDEODISKS;

DIGITAL VIDEO DISK; DIRECT AND INDIRECT METHODS; ELECTRICAL SYSTEMS; MICROMECHANICAL PROPERTY; NUMERICAL APERTURE; RELIABILITY EVALUATION; STRUCTURAL RELIABILITY; THIN-FILM PROPERTIES;

COMPUTER GRAPHICS;

EID: 0346874122     PISSN: 12259438     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF03026407     Document Type: Article

References (4)

1. S. D. Senturia, J. Microelectromechanical Systems 6, 107 (1997).
2. G. Povirk, J. Bernstein and S. Brown, MRS Proceedings, p. 99, MRS (1993).
3. J. Conally and S. Brown, Experimental Mechanics, June, 81 (1993).
4. P. Osterberg, H. Yie, X. Cai, J. White and S. Senturia, Proceedings of MEMS '94, p. 28, Oiso, Japan (1994).