Transport theories of sputtering

Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences

Volumn 362, Issue 1814, 2004, Pages 139-156

  Jakas, Mario M ^a  

^a UNIVERSIDAD DE LA LAGUNA   (Spain)

Author keywords

Ion surface interactions; Sputtering; Surface cleaning; Surface etching; Surface patterning; Transport theory

Indexed keywords

EID: 0346801866     PISSN: 1364503X     EISSN: None     Source Type: Journal    
DOI: 10.1098/rsta.2003.1305     Document Type: Review

References (32)

1. Abramowitz, M. & Stegun, I. (eds) 1970 Handbook of mathematical functions, 9th edn. New York: Dover.
2. Andersen, H. H. & Bay, H. L. 1975 Heavy-ion sputtering yield of gold: further evidence of nonlinear effects. J. Appl. Phys. 46, 2416-2422.
3. Beckurst, K. H. & Wirtz, K. 1964 Neutron physics. Springer.
4. Biersack, J. P. & Eckstein, W. 1984 Sputtering studies with Monte-Carlo program TRIM.SP. Appl. Phys. A 34, 73-94.
5. Bohdansky, J. 1980 Important sputtering yield data for tokamaks: a comparison of measurements and estimates. J. Nucl. Mater. 93/94, 44-60.
6. Bohdansky, J. 1984 A universal relation for the sputtering yield of mono-atomic solids at normal ion incidence. Nucl. Instrum. Meth. Phys. Res. B 2, 587-591.
7. Case, K. M. & Zweifel, P. F. 1967 Linear transport theory. Reading, MA: Addison-Wesley.
8. Coburn, J. W., Winters, H. F. & Chuang, T. J. 1977 Ion-surface interactions in plasma etching. J. Appl. Phys. 48, 3532.
9. Eckstein, W., García-Rosales, J., Roth, J. & Ottenberger, W. 1993 Sputtering data. Report no. IIP 9/82. Max Planck Institute for Plasma Physics, Garching, Germany.
10. Eernisse, E. P. 1971 Sputtering and strain of Silicon by ion implantation. J. Appl. Phys. 42, 480-485.
11. Firsov, O. B. 1958 Calculation of the interaction potential of atoms. JETP 6, 534-537.
12. + ions on gold-films. Thin Solid Films 87, 379-383.
13. Gillen, D. R., Graham, W. G. & Goelich, A. 2002 Sputtering of copper atoms by keV atomic and molecular ions: a comparison of experiment with analytical and computer based models. Nucl. Instrum. Meth. Phys. Res. B 194, 409-416.
14. Grove, W. R. 1852 On the electrochemical polarity of gases. Phil. Trans. R. Soc. Lond. 142, 87-101.
15. Jakas, M. M., Bringa, E. M. & Johnson, R. E. 2002 Fluid dynamics calculation of sputtering from a cylindrical spike. Phys. Rev. B 65, 165425.
16. Janev, R. K., Ralchenko, Yu. V., Kenmotsu, T. & Hosaka, K. 2001 Unified analytical representation of physical sputtering yield. J. Nucl. Mater. 290/293, 104-106.
17. Lindhard, J., Sharff, M. & Schiott, H. E. 1963 Range concepts and heavy-ion ranges (notes on atomic collisions. II). Mat.-Fys. Med. König. Vid. Selsk. 33(14), 1-42.
18. Lindhard, J., Nielsen, V. & Scharff, M. 1968 Approximation method in classical scattering by screened Coulomb fields (notes on atomic collisions. I). Mat.-Fys. Med. König. Vid. Selsk. 36(10), 1-32.
19. Morse, P. M. & Feschbach, H. 1953 Methods of theoretical physics. New York: McGraw-Hill.
20. Oliva-Florio, A., Baragiola, R. A., Jakas, M. M., Alonso, E. V. & Ferrón, J. 1987 Noble-gas ion sputtering yield of gold and copper: dependence on the energy and angle of incidence of the projectiles. Phys. Rev. B 35, 2189-2204.
21. Plücker, J. 1858 Observations on the electrical discharge through rarefied gases. Phil. Mag. 16, 409-418.
22. Sigmund, P. 1969 Theory of sputtering. I. Sputtering yield of amorphous and polycrystalline targets. Phys. Rev. 184, 383-395.
23. Sigmund, P. 1972 Collision theory of displacement damage, ion ranges, and sputtering. Rev. Roum. Phys. 17, 823-870, 969-1000, 1079-1106.
24. Smith, R., Jakas, M. M., Ashworth, D., Oven, B., Bowyer, M., Chakarov, I. & Webb, R. 1997 Atomic and ion collisions in solids and at surfaces. Cambridge University Press.
25. Sommerfeldt, H., Mashkova, E. S. & Molcahnov, V. A. 1972 Sputtering of silicon and germanium by middle-energy heavy-ions. Phys. Lett. A 38, 237-242.
26. Thompson, M. W. 1968 Energy spectrum of ejected atoms during high-energy sputtering of gold. Phil. Mag. 18, 377-414.
27. Williams, M. M. R. 1971 Mathematical methods in particle transport theory. London: Butterworth.
28. Williams, M. M. R. 1976 Energy-spectrum of sputtered atoms. Phil. Mag. 34, 669-683.
29. Williams, M. M. R. 1981 The energy-spectrum of sputtered atoms. 2. Phil. Mag. A 43, 1221-1252.
30. Winterbon, K. B., Sigmund, P. & Sanders, J. B. 1970 Spatial distribution of energy deposited by atomic particles in elastic collisions. Mat.-Fys. Med. König. Vid. Selsk. 37(14), 1-73.
31. Yamamura, Y. & Mizuno, Y. 1985 Low-energy sputtering with the Monte-Carlo program ACAT. Report no. IPPJ-AM-40. Institute of Plasma Physics, Nagoya, Japan.
32. Zalm, P. C., Beckers, L. J. & Sanders, F. H. M. 1983 On the role of physical sputtering in reactive ion-beam etching. Nucl. Instrum. Meth. Phys. Res. B 209/210, 561-565.