Integration issues for 850 nm optical modulators on Si electronics by direct epitaxy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 4, 1997, Pages 886-890

  Cunningham, J E ^a   Jan, W Y ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0346579728     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589503     Document Type: Article

References (19)

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