Effect of BF2 implantation on ultrathin gate oxide reliability

Applied Physics Letters

Volumn 69, Issue 11, 1996, Pages 1591-1592

  Lin, Chuan ^a   Chou, Anthony I ^a   Kumar, Kiran ^a,b   Choudhury, Prasenjit ^a   Lee, Jack C ^a  

^a The University of Texas at Austin   (United States)

^b AGERE SYSTEMS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0346562989     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.117040     Document Type: Article

References (7)

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