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Volumn 8, Issue 8-9, 1999, Pages 1677-1681
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Influence of UV-laser radiation on the synthesis of DLC films by ECR-plasma-CVD
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Author keywords
DLC films; ECR plasma CVD
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Indexed keywords
DEPOSITION;
FILM GROWTH;
IONS;
LASER APPLICATIONS;
MICROHARDNESS;
NANOSTRUCTURED MATERIALS;
PHASE TRANSITIONS;
RAMAN SPECTROSCOPY;
STRESSES;
ULTRAVIOLET RADIATION;
DIAMOND LIKE CARBON FILMS;
LASER INDUCED STRUCTURAL TRANSFORMATIONS;
SPECTRAL AND ENERGETIC PARAMETERS;
STRUCTURAL PROPERTIES;
ULTRAVIOLET LASER IRRADIATION;
DIAMOND FILMS;
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EID: 0346544788
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/s0925-9635(99)00052-7 Document Type: Article |
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Times cited : (4)
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References (7)
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