Laser-assisted ECR-plasma-CVD of a-C:H films

Diamond and Related Materials

Volumn 5, Issue 3-5, 1996, Pages 420-424

  Metev, S M ^a   Ozegowski, M ^a   Meteva, K ^a   Sepold, G ^a   Kononenko, T V ^b   Konov, V I ^b   Obraztsova, E D ^b   Pimenov, S M ^b   Ralchenko, V G ^b   Smolin, A A ^b  

^a BIAS BREMER INSTITUT FÜR ANGEWANDTE STRAHLTECHNIK GMBH   (Germany)

^b PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

Author keywords

a C:H film; ECR plasma CVD; Excimer laser; Raman spectroscopy

Indexed keywords

EID: 0043038387     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-9635(95)00460-2     Document Type: Article

References (9)

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