On the sputtering deposition process of silicon suboxide thin films

Journal of Optoelectronics and Advanced Materials

Volumn 4, Issue 4, 2002, Pages 959-964

  Tomozeiu, N ^a  

^a UTRECHT UNIVERSITY   (Netherlands)

Author keywords

Optical emission spectroscopy; Rutherford backscattering; SiOx; Thin film

Indexed keywords

BACKSCATTERING; LIGHT EMISSION; OPTICAL EMISSION SPECTROSCOPY; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON COMPOUNDS; THIN FILMS;

DEPOSITION SURFACE; MAGNETRON-SPUTTERING DEPOSITION; OPTICAL EMISSION SPECTROSCOPIES (OES); RUTHERFORD BACK-SCATTERING; SILICON DEPOSITION; SILICON SUB-OXIDE THIN FILMS; SIOX; SPUTTERING DEPOSITION;

DEPOSITION;

EID: 0346537850     PISSN: 14544164     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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