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Volumn 40, Issue 1, 2004, Pages 63-65
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Integrated optics ring-resonator chemical sensor with polymer transduction layer
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Author keywords
[No Author keywords available]
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Indexed keywords
AIR QUALITY;
ANNEALING;
CHEMICAL SENSORS;
CLADDING (COATING);
ELECTRIC CONDUCTIVITY;
ELLIPSOMETRY;
LITHOGRAPHY;
OPTIMIZATION;
PERTURBATION TECHNIQUES;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
POLYMERS;
REFRACTIVE INDEX;
RESONANCE;
RESONATORS;
WAVEGUIDES;
BUFFERED OXIDE ETCHANT (BOE);
OPTICAL LOSSES;
INTEGRATED OPTICS;
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EID: 0346499666
PISSN: 00135194
EISSN: None
Source Type: Journal
DOI: 10.1049/el:20040062 Document Type: Article |
Times cited : (58)
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References (7)
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