Nanosized columnar microstructure and related properties of amorphous Al2O3 thin films

Journal of Optoelectronics and Advanced Materials

Volumn 5, Issue 3, 2003, Pages 675-678

  Krumov, E ^a   Mankov, V ^a   Starbova, K ^a  

^a CENTRAL LABORATORY OF PHOTOPROCESSES   (Bulgaria)

Author keywords

Amorphous Al2O 3 films; Microstructure; Obliquely vacuum deposition

Indexed keywords

ALUMINA; AMORPHOUS FILMS; CRYSTAL MICROSTRUCTURE; ELECTRON IRRADIATION; MICROHARDNESS; MORPHOLOGY; NANOSTRUCTURED MATERIALS; REFRACTIVE INDEX; SPECTROPHOTOMETRY; THERMAL DIFFUSION;

ELECTRON OPTICAL IMAGING; VAPOR INCIDENCE ANGLE;

THIN FILMS;

EID: 0346334264     PISSN: 14544164     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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