Measurements of High-Temperature Silane Pyrolysis Using Sih 4 IR Emission and SiH 2 Laser Absorption

Journal of Physical Chemistry A

Volumn 107, Issue 50, 2003, Pages 10988-10995

  Petersen, Eric L ^a   Crofton, Mark W ^b  

^a AEROSPACE CORPORATION   (United States)

^b UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GAS CONSTANT; LASER ABSORPTION;

ACTIVATION ENERGY; CHEMICAL VAPOR DEPOSITION; HIGH PRESSURE EFFECTS; HIGH TEMPERATURE EFFECTS; INFRARED RADIATION; LIGHT ABSORPTION; MOLECULAR DYNAMICS; PYROLYSIS; REACTION KINETICS; SHOCK WAVES;

SILANES;

EID: 0346307307     PISSN: 10895639     EISSN: None     Source Type: Journal    
DOI: 10.1021/jp0302663     Document Type: Article

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