Pyrolysis mechanism of silanes, difluorosilane, and their mixtures

Journal of the Electrochemical Society

Volumn 143, Issue 6, 1996, Pages 1996-2002

  Han, Jae Hyun ^a,c   Rhee, Shi Woo ^b,c   Moon, Sang Heup ^a,c  

^a Seoul National University   (South Korea)

^b Pohang University of Science and Technology (POSTECH)   (South Korea)

^c ELECTROCHEMICAL SOCIETY

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTIONS; INFRARED SPECTROSCOPY; MASS SPECTROMETRY; MIXTURES; PRESSURE MEASUREMENT; PYROLYSIS;

COMPENSATION EFFECT; DIFLUOROSILANE; GAS PHASE REACTION; ISOTHERMAL CONDITIONS; THEORY OF UNIMOLECULAR REACTION;

SILANES;

EID: 0030171122     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1836938     Document Type: Article

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