Novel fast atom beam (FAB) processes for fabricating functional nanostructures on three-dimensional microstructures

Microsystem Technologies

Volumn 3, Issue 3, 1997, Pages 112-116

  Hatakeyama, M ^a   Tanaka, S ^b   Ichiki, K ^a   Toma, Y ^a   Nakao, M ^b   Hatamura, Y ^b  

^a EBARA CORPORATION   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0346258441     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050066     Document Type: Article

References (9)

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6. M. Hatakeyama et al. (1995), IEICE Transactions on Electronics, E78-C, p. 174
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8. M. Nakao et al. (1995), Procs. of ASPE 10th annual meeting, p. 376
9. AN Broers et al. (1976) , Appl. Phys. Letter 29, No. 9, p. 596