Defect imaging using convergent beam ion channeling patterns

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 140, Issue 1-2, 1998, Pages 178-184

  Breese, M B H ^a   Baues III, A A ^b  

^a CENTRO DE FÍSICA NUCLEAR DA UNIVERSIDADE DE LISBOA   (Portugal)

^b University of Florida ^*  (United States)

Author keywords

Convergent beam channeling patterns; Defect imaging; Mosaic spread; Nuclear microprobe; Planar oscillations

Indexed keywords

CRYSTAL DEFECTS; CRYSTAL LATTICES; IMAGING TECHNIQUES; ION BEAMS; LATTICE VIBRATIONS; PROTONS;

CONVERGENT BEAM ION CHANNELING PATTERNS; DEFECT IMAGING; NUCLEAR MICROPROBES;

SEMICONDUCTING SILICON;

EID: 0346131918     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)01018-5     Document Type: Article

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