A cross-sectional atomic force microscopy study of nanocrystalline Ge precipitates in SiO2 formed from metastable Si1-xGexO2

Journal of Applied Physics

Volumn 82, Issue 4, 1997, Pages 1626-1631

  Caragianis Broadbridge, C ^a   Blaser, J M ^b,c   Paine, D C ^b  

^a TRINITY COLLEGE   (United States)

^b Brown University   (United States)

^c HEWLETT PACKARD COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0346109132     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365962     Document Type: Article

References (21)

1. Y. Maeda, Phys. Rev. B 51, 1658 (1995).
2. C. M. Yang, K. V. Shcheglov, M. L. Brongersma, A. Polman, and H. A. Atwater, Mater. Res. Soc. Symp. Proc. 358, 181 (1995).
3. Y. Osaka, K. Tsunetomo, F. Toyomura, H. Myoren, and K. Kohno, Jpn. J. Appl. Phys. 2, Lett. 31, L365 (1992).
4. H. A. Atwater, K. V. Shcheglov, S. S. Wong, K. J. Vahala, R. C. Flagan, M. L. Brongersma, and A. Polman, Mater. Res. Soc. Symp. Proc. 321, 363 (1994).
5. J. G. Zhu, C. W. White, J. D. Budai, S. P. Withrow, and Y. Chen, J. Appl. Phys. 78, 4386 (1995).
6. X. Liu, X. Wu, X. Bao, and Y. He, Appl. Phys. Lett. 64, 220 (1994).
7. D. C. Paine, C. Caragianis, T. Y. Kim, Y. Shigesato, and T. Ishahara, Appl. Phys. Lett. 62, 2842 (1993).
8. W. S. Liu, M. J. S. Chen, M.-A. Nicolet, V. Arbet-Engels, and K. L. Wang, Appl. Phys. Lett. 62, 3321 (1993).
9. R. A. Kiehl, M. Yamaguchi, O. Ueda, N. Horiguchi, and N. Yokoyama, Appl. Phys. Lett. 68, 478 (1996).
10. D. C. Paine, C. Caragianis, and A. F. Schwartzman, J. Appl. Phys. 70, 5076 (1991).
11. C. Caragianis, Y. Shigesato, and A. F. Schwartzman, J. Electron. Mater. 23, 883 (1994).
12. D. C. Paine, C. Caragianis, and Y. Shigesato, Appl. Phys. Lett. 60, 2886 (1992).
13. J. M. Blaser, C. Caragianis-Broadbridge, B. L. Waiden, and D. C. Paine, Mater. Res. Soc. Symp. Proc. 398, 619 (1996).
14. D. C. Paine, J. J. Rosenberg, S. C. Martin, D. Luo, and M. Kawasaki, Appl. Phys. Lett. 57, 1443 (1990).
15. S. J. Klepeis, Mater. Res. Soc. Symp. Proc. 115, 179 (1987).
16. V. Raineri, V. Privitera, W. Vandervorst, L. Hellemans, and J. Snauwaert, Appl. Phys. Lett. 64, 354 (1994).
17. D. Keller, D. Deputy, A. Alduino, and K. Luo, Ultramicroscopy 42, 1481 (1992).
18. D. Keller, Surf. Sci. 253, 353 (1991).
19. H. Fischer and J. Nittmann, Mater. Res. Soc. Symp. Proc. 406, 201 (1996).
20. J. S. Villarrubia, Surf. Sci. 231, 287 (1994).
21. H. Ximen and P. E. Russell, Ultramicroscopy 42, 1526 (1992).