Preparation of hydrogenated amorphous germanium nitrogen alloys by plasma enhanced chemical vapor deposition

Journal of Applied Physics

Volumn 80, Issue 8, 1996, Pages 4703-4706

  Xu, Jun ^a   Chen, Kunji ^a   Feng, Duan ^a   Miyazaki, Seiichi ^b   Hirose, Masataka ^b  

^a NANJING UNIVERSITY   (China)

^b HIROSHIMA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0346094140     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.363454     Document Type: Article

References (22)

1. D. E. Carlson and C. R. Wronski, Appl. Phys. Lett. 28, 671 (1976).
2. Y. Tawada, M. Kondo, H. Okamoto, and Y. Hamakawa, Sol. Energy Mater. 6, 237 (1982).
3. K. D. Mackenzie, J. R. Eggert, D. J. Leopold, Y. M. Li, S. Lin, and W. Paul, Phys. Rev. B 31, 2198 (1985).
4. Y. M. Li and B. F. Fieselmann, Appl. Phys. Lett. 59, 1720 (1991).
5. A. Catalano, Amorphous & Microcrystalline Semiconductor Devices-Optoelectronic Devices, edited by J. Kanicki (Artech House, Boston, 1991), p. 9.
6. V. L. Dalal, IEEE Trans. Electron Devices 27, 662 (1980).
7. J. J. Hanak, J. Non-Cryst. Solids 35, 755 (1980).
8. G. R. Bagratishvili, R. B. Dzhanelidz, and D. A. Jishiavshvili, Phys. Status Solidi A 78, 115 (1983).
9. I. Chambouleyron, Appl. Phys. Lett. 47, 117 (1985).
10. I. Honma, K. Kawai, H. Komiyama, and K. Tanaka, Appl. Phys. Lett. 50, 276 (1987).
11. I. Honma, H. Kawai, H. Komiyama, and K. Tanaka, J. Appl. Phys. 65, 1074 (1989).
12. T. Drusedau, J. Non-Cryst. Solids 137, 821 (1991).
13. I. Sakata, Y. Hayashi, M. Yamanaka, and Y. Karasawa, J. Appl. Phys. 52, 4334 (1981).
14. T. Tiedje and B. Abeles, Appl. Phys. Lett. 45, 179 (1984).
15. S. Miyazaki, Y. Ihara, and M. Hirose, Phys. Rev. Lett. 59, 125 (1987).
16. I. Honma, H. Komiyama, and K. Tanaka, Philos. Mag. B 60, 3 (1989).
17. J. Jiang, K. Chen, X. Huang, Z. Li, and D. Feng, Solid State Commun. 92, 227 (1994).
18. Y. Hazama, K. Yamada, S. Miyazaki, and M. Hirose, J. Non-Cryst. Solids 114, 777 (1989).
19. S. Miyazaki, K. Yamada, and M. Hirose, J. Non-Cryst. Solids 137, 1119 (1991).
20. A. Matsuda, M. Koyama, N. Ikuchi, Y. Imanishi, and K. Tanaka, Jpn. J. Appl. Phys. 25, L54 (1986).
21. J. Xu, S. Miyazaki, and M. Hirose, Jpn. J. Appl. Phys. 34, L203 (1995).
22. J. Xu, S. Miyazaki, and M. Hirose, Jpn. J. Appl. Phys. 35, 2043 (1996).