Using Factorial Design and Response Surface Methodology to Optimize Growth Parameters of PECVD Grown Silicon Nitride

Physica Scripta T

Volumn 79, Issue , 1999, Pages 266-271

  Nybergh, K ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0346048016     PISSN: 02811847     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (16)

1. Chen, Z., Sana, P., Salami, J. and Rohatgi, A., IEEE Trans. Electron. Devices 40, 1161 (1993).
2. Ruby, D. S., Wilbanks, W. L. and Fleddermann, C. B., in Proc. 1994 IEEE First World Conference Photovoltaic Energy Conversion 1335 (1994).
3. Chen, Z. and Rohatgi, A., in Proc. 1994 IEEE First World Conference Photovoltaic Energy Conversion 1331 (1994).
4. Leguijt, C. et al., Solar Energy Materials Solar Cells 40, 297 (1996).
5. Nybergh, K., Marjamäki, T and Laakso, M., in Proc. 7th International Conf. Solar Energy at High Latitudes 598 (1997).
6. Ezer, Y. et al., accepted for publication in Materials Research Bulletin, 33 (1998).
7. Pang, S. K., Rohatgi, A., Sopori, B. L. and Fiegl, G., J. Electrochem. Soc. 137, 1977 (1990).
8. Himmel, C. D. and May, G. S., IEEE Trans. Semicond. Manufact. 6, 103 (1993).
9. Shumate, D. A. and Montgomery, D. C., IEEE Trans. Semicond. Manufact. 9, 335 (1996).
10. Han, S.-S., Cai, L., May, G. S. and Rohatgi, A., IEEE Trans. Semicond. Manufact. 9, 303 (1996).
11. Cai, L., Rohatgi, A., Yang, D. and El-Sayed, M. A., J. Appl. Phys. 80, 5384 (1996).
12. Huang, Y. L., Edgar, T. F., Himmelblau, D. M. and Trachtenberg, I., IEEE Trans. Semicond. Manufact., 7, 333 (1994).
13. Han, S.-S. and May, G. S., IEEE Trans. Semicond. Manufact., 10, 279 (1997).
14. May, G. S., Huang, J. and Spanos, C. J., IEEE Trans. Semicond. Manufact., 4, 83 (1991).
15. Nybergh, K., Marjamäki, T. and Skarp, E., in Proc. 26th IEEE Photovoltaic Specialists Conference, 143 (1997).
16. Montgomery, D. C., "Design and Analysis of Experiments", 4th ed. (John Wiley & Sons, New York 1997).