Exploration of Chemically Amplified Resist Mechanisms and Performance at Small Linewidths

ACS Symposium Series

Volumn 706, Issue , 1998, Pages 134-143

  Taylor, James W ^a   Dentinger, Paul M ^a   Rhyner, Steven J ^a   Reynolds, Geoffrey W ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0345985753     PISSN: 00976156     EISSN: None     Source Type: Book Series    
DOI: 10.1021/bk-1998-0706.ch011     Document Type: Article

References (8)

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3. Gamsky, C. J.; Dentinger, P. M.; Howes, G. R.; Taylor, J. W. Proc. SPIE 1995, 2438, 143-152.
4. Dentinger, P. M.; Nelson, C. M.; Rhyner, S. J.; Taylor, J. W.; Fedynyshyn, T. H.; Cronin, M. F. J. Vac.Sci. Tech. B 1996,14, 4239-4245.
5. Dentinger, P. M.; Taylor, J. W. J.Vac.Sci.Tech.B 1997, 15, 2632-2638.
6. Shih, H.-Y.; Reiser, A. Macromolecules 1995, 28, 5595-5600.
7. Martin, Y.; Wickramasinghe, H. K. Appl. Phys. Lett. 1994, 64, 2498-2500.
8. Henderson, C. L.; Tsiartas, P. C.; Simpson, L. L.; Clayton, K. D.; Pancholi, S.; Pawloski, A. R.; Willson, C. G. Proc. SPIE 1996, 2724, 481-490.