Local Modification of the Optical Constants of Polymeric Films by Ion Implantation

Russian Microelectronics

Volumn 30, Issue 5, 2001, Pages 324-329

  Leont'ev, A V ^a  

^a BELARUSIAN STATE UNIVERSITY   (Belarus)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0345855020     PISSN: 10637397     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1011944813048     Document Type: Article

References (21)

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