Plasma-based nitrogen incorporation techniques for surface modification

Current Science

Volumn 83, Issue 3, 2002, Pages 263-270

  Mukherjee, S ^a  

^a INSTITUTE FOR PLASMA RESEARCH   (India)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0345733474     PISSN: 00113891     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (30)

1. Rie, K. T., Menthe, E., Matthews, A., Legg, K. and Chin, J., MRS Bull., August, 1996, p. 46.
2. Jindal, P. C., J. Vac. Sci. Technol., 1978, 15, 313.
3. Rej, D. J., in Handbook of Thin Film Process Technology, IOP Publishing, 1996.
4. Collins, G. A. and Tendys, J., J. Vac. Sci. Technol., 1994, B14, 875.
5. Baldwin, M. J., Fewell, M. P., Haydon, S. C., Kumar, S., Collins, G. A., Short, K. T. and Tendys, J., Surf. Coat. Technol., 1998, 98, 1187.
6. Mukherjee, S. and John, P. I., ibid, 1997, 93, 188.
7. Mukherjee, S., Phy. Plasmas, 2001, 8, 364.
8. Guenzel, R., Betzl, M., Alphonsa, I., Ganguly, B., John, P. I. and Mukherjee, S., Surf. Coat. Technol., 1998, 112, 307.
9. Petitjean, L. and Ricard, A., J. Phys. D. Appl. Phys., 1984, 17, 919.
10. Ricard, A., Henrion, G., Michel, M. and Gantois, M., Pure Appl. Chem., 1988, 60, 747.
11. Lieberman, M. A., J. Appl. Phys., 1989, 66, 2926.
12. Malik, S. M., Sridharan, K., Fetherson, R. P., Chen, A. and Conrad, J. R., J. Vac. Sci. Technol., 1994, B12, 843.
13. Guenzel, R., Brutscher, J., Maendl, S. and Moeller, W., Surf. Coat. Technol., 1997, 96, 16.
14. Blawert, C., Knoop, F. M., Weisheit, A. and Mordike, B. L., ibid, 1996, 85, 15.
15. Blawert, C., Surf. Eng., 1999, 15, 1.
16. Baldwin, M. J., Collins, G. A., Fewell, M. P., Haydon, S. C., Kumar, S., Short, K. T. and Tendys, J., Jpn. J. Appl. Phys., 1997, 36, 4941.
17. Mukherjee, S. and John, P. I., Surf. Coat. Technol., 1998, 98, 1437.
18. Rao, K. R. M., Mukherjee, S., Raole, P. M. and Manna, I., Surf. Coat. Technol., (submitted).
19. Mukherjee, S., Raole, P. M. and John, P. I., submitted to Surf. Coat. Technol., (submitted).
20. Kumar, R., M Phil thesis, Devi Ahilya University, 1999.
21. O'Brien, J. M. and Goodman, D., in ASM Handbook, ASM International, USA, 1992, vol. 4, p. 420.
22. Keller, K., HTM, 26, 120, 1971.
23. Tibbetts, G. G., J. Appl. Phys., 1974, 45, 5072.
24. Hudis, M., ibid, 44, 1489, 1973.
25. Szabo, A. and Wilhelmi, H., HTM, 1984, 39, 148.
26. Bell, T., Staines, A. M. and Loh, N. L., Neue Hüette, 1983, 28, 373.
27. Hombeck, F. and Bell, T., Surf. Eng., 1991, 7, 45.
28. Blawert, C., Ph D thesis, TU Clausthal, 2000.
29. Chakraborty, J., Alphonsa, I., Mukherjee, S. and John, P. I., submitted to J. Mater. Res.
30. Michel, H., Czerwiec, T., Gantois, M., Ablitzer, D. and Ricard, A., Surf. Coat. Technol., 1995, 72, 103.