Utilization of plasma source ion implantation for tribological applications

Surface and Coatings Technology

Volumn 96, Issue 1, 1997, Pages 16-21

  Gunzel R ^a   Brutscher, J ^a   Mandl S ^a   Moller W ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

Austentic steel; Plasma sheath; Plasma source ion implantation; Surface engineering

Indexed keywords

CALCULATIONS; HARDNESS; IONS; MATHEMATICAL MODELS; MECHANICAL VARIABLES MEASUREMENT; NITROGEN; PLASMA SOURCES; SPECIFICATIONS; STEEL; SURFACE TREATMENT; THREE DIMENSIONAL; WEAR OF MATERIALS;

AUSTENTIC STEEL; BEAM RASTER SYSTEM; PLASMA SHEATH DYNAMICS; PLASMA SHEATH EXPANSION; PLASMA SOURCE ION IMPLANTATION; SURFACE ENGINEERING; TARGET HANDLING;

ION IMPLANTATION;

EID: 0031551688     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)80007-8     Document Type: Article

References (37)

1. G. Dearnaley, Surf. Coat. Technol. 65 (1994) 1.
2. J. Conrad, J.L. Radtke, R.A. Dodd, F.J. Worzala, N.C. Tran, J. Appl. Phys. 62 (1987) 4591.
3. J. Tendys, I.J. Donnelly, M.J. Kenny, J.T.A. Pollock, Appl. Phys. Lett. 53 (1988) 2143.
4. S. Mändl, N.P. Barradas, J. Brutscher, R. Günzel, W. Möller, Comparison of measured and calculated dose for plasma source ion implantation in 3-D objects, Nucl. Instrum. Meth. B127/128, 996 (1997).
5. P.A. Dearnley, A. Namvar, G.G.A. Hibberd, T. Bell, in: E. Broszeit, W.D. Münz, H. Oechsner, K.-T. Rie, G.K. Wolf (Eds.), Proc. 1st Int. Conf. on Plasma Surface Engineering, Garmisch-Partenkirchen, September 1988, Vol. 1, Deutsche Gesellschaft für Metallkunde, Oberursel, 1989, p. 219.
6. E. Rolinski, Surf. Eng. 3 (1987) 35.
7. V. Vahedi, M.A. Liebermann, M.V. Alves, J.P. Verboncoeur, C.K. Birdsall, J. Appl. Phys. 69 (1991) 2008.
8. T.E. Sheridan, J. Appl. Phys. 74 (1993) 4903.
9. J. Brutscher, Rev. Sci. Instrum. 67 (1996) 2621.
10. C.G. Smits (Ed.), The Collected Works of Irving Langmuir, Vol. 4, Pergamon, New York, 1961, pp. 1-98.
11. M. Widner, I. Alexeff, W.D. Jones, K.E. Lonngren, Phys. Fluids 13 (1970) 2532.
12. M. Shamim, J.T. Scheuer, J.R. Conrad, J. Appl. Phys. 69 (1991) 2904.
13. M.A. Lieberman, J. Appl. Phys. 66 (1989) 2926.
14. D. Bohm, in: A. Guthry R.K. Wakerling (Eds.), The Characteristics of Electrical Discharges in Magnetic Fields, MacGraw-Hill, New York, 1949, p. 77.
15. K.-U. Riemann, J. Phys. D: Appl. Phys. 24 (1991) 493.
16. F. Chen, Introduction to Plasma Physics, Plenum, New York, 1974, p. 244.
17. J. Brutscher, R. Günzel, W. Möller, Plasma Sources Sci. Technol. 5 (1996) 54.
18. C.D. Child, Phys. Rev. 32 (1911) 492.
19. W. En, N.W. Cheung, J. Vac. Sci. Technol. B12 (1994) 833.
20. S. Mändl, J. Brutscher, R. Günzel, W. Möller, to be published in J. Phys. D: Appl. Phys.
21. S. Mändl, J. Brutscher, R. Günzel, W. Möller, Nucl. Instr. Meth. B112 (1996) 252.
22. S. Mändl, J. Brutscher, R. Günzel, W. Möller, J. Vac. Sci. Technol. B14 (1996) 2701.
23. J. Brutscher, Ph.D. Thesis, Johann Wolfgang Goethe-Universität Frankfurt/M., 1993.
24. G.A. Collins, R. Hutchings, K.T. Short, J. Tendys, C.H. Van Der Valk, Surf. Coat. Technol. 84 (1996) 537.
25. J.P. Blanchard, J. Vac. Sci. Technol. B12 (1994) 910.
26. J. Hartmann, W. Ensinger, R.W. Thomae, H. Bender, A. Königer, B. Stritzker, B. Rauschenbach, Nucl. Instr. Meth. B112 (1996) 255.
27. S.M. Malik, D.E. Muller, K. Sridharan, R.P. Fetherston, N. Tran, J. Conrad, J. Appl. Phys. 77 (1995) 1015.
28. T.E. Sheridan, Appl. Phys. Lett. 68 (1996) 1918.
29. M.W. Kissick, M.P. Hong, M.M. Shamin, J.D. Callen, J.R. Conrad, G.A. Emmert, J. Appl. Phys. 76 (1994) 7616.
30. Los Alamos Accelerator Code Group, The Poisson/Superfish group of codes, LA-UR-87-115, Los Alamos National Laboratory, 1987.
31. Z.L. Zhang, T. Bell, Surf. Eng. 1 (1985) 131.
32. C. Blawert, private communications.
33. M.E. Chabica, O.L. Williamson, R. Wei, P.J. Wilbur, Surf. Coat. Technol. 51 (1992) 24.
34. M. Samandi, B.A. Shedden, D.I. Smith, G.A. Collins, R. Hutchings, J. Tendys, Surf. Coat. Technol. 59 (1993) 261.
35. M. Samandi, B.A. Shedden, T. Bell, G.A. Collins, R. Hutchings, J. Tendys, J. Vac. Sci. Technol. B12 (1994) 935.
36. O.L. Williamson, O. Ozturk, R. Wei, J.P. Wilbur, Surf. Coat. Technol. 65 (1994) 15.
37. J. Bohdansky, Phys. Res. 32 (1984) 587.