Micromachined 2D nanoelectrospray emitter

Electronics Letters

Volumn 39, Issue 24, 2003, Pages 1702-1703

  Arscott, Steve ^a   Le Gac, S ^b   Druon, C ^a   Tabourier, P ^a   Rolando, C ^b  

^a INSTITUT D ELECTRONIQUE   (France)

^b UNIV LILLE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POTENTIAL; MASS SPECTROMETRY; MICROMACHINING; PHOTORESISTS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MODELS;

NANOELECTROSPRAY EMITTER; PHOTOMASKING;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0345566243     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20031099     Document Type: Article

References (5)

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2. Figeys, D., and Pinto, D.: 'Proteomics on a chip: promising developments', Electrophoresis, 2001, 22, pp. 208-216
3. Griss, P., Melin, J., Sjodahl, J., Roeraade, J., and Stemme, G.: 'Development of micromachined hollow tips for protein analysis based on nanoelectrospray ionisation mass spectrometry', J. Micromech. Microeng., 2002, 12, pp. 682-687
4. Lin, L., and Pisano, P.: 'Silicon processed micro-needles', IEEE J. Micromech. Sys., 1999, 8, pp. 78-84
5. Lin, C.-H., Lee, G.-B., Chang, B.-W., and Chang, G.-L.: 'A new fabrication process for ultra-thick microfluidic microstructures utilizing SU-8 photo resist', J. Micromech. Microeng., 2002, 12, pp. 590-597