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Volumn 23, Issue 6-8, 2003, Pages 1013-1016
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Nanostructure and optical properties of CeO2 thin films obtained by plasma-enhanced chemical vapor deposition
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Author keywords
CeO2; Nanostructured films; Optical properties; Spectroscopic Ellipsometry
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
ELLIPSOMETRY;
SUBSTRATES;
SURFACE ROUGHNESS;
SYNTHESIS (CHEMICAL);
THERMAL EFFECTS;
THIN FILMS;
PHOTON ENERGY;
CERIUM COMPOUNDS;
NANOTECHNOLOGY;
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EID: 0345550286
PISSN: 09284931
EISSN: None
Source Type: Journal
DOI: 10.1016/j.msec.2003.09.103 Document Type: Article |
Times cited : (68)
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References (13)
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