Fabrication of metal field emitter arrays on polycrystalline silicon

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 2, 1997, Pages 468-471

  Kim, Il Hwan ^a   Lee, Chun Gyoo ^a   Kim, Yeo Hwan ^b   Park, Byung Gook ^a   Lee, Jong Duk ^a  

^a Seoul National University   (South Korea)

^b Catholic Kwandong University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0345454554     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589601     Document Type: Article

References (5)

1. C. G. Lee, B. G. Park, and J. D. Lee, IEEE Electron Device Lett. 17, 115 (1996).
2. E. A. Irene, E. Tierney, and D. W. Dong, J. Electeon. Soc. 127, 705 (1980).
3. S. Wolf, Silicon Processing for the VLSI Era Volume 2 - Process Integration (Lattice Press, Sunset Beach, 1990).
4. TSUPREM-4 User's Manual (Technology Modeling Associates, Palo Alto, CA, 1991).
5. G. Harbeke, L. Krausbauer, E. F. Steigmeier, A. E. Widmer, H. F. Kappert, and G. Neugebauer, J. Electrochem. Soc. 131, 675 (1984).