Nanoaccuracy position control of a pneumatic cylinder driven table

JSME International Journal, Series C: Mechanical Systems, Machine Elements and Manufacturing

Volumn 46, Issue 3, 2003, Pages 1062-1067

  Pai, Kei Ren ^a   Shih, Ming Chang ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Fuzzy control; Nanometer positioning; Pneumatic table; Velocity compensation

Indexed keywords

CYLINDERS (SHAPES); FUZZY CONTROL; POSITION CONTROL; SERVOMECHANISMS; VELOCITY MEASUREMENT;

PNEUMATIC CYLINDERS; ULTRAPRECISION TABLES;

PNEUMATIC CONTROL;

PNEUMATIC CONTROL SYSTEM; PNEUMATIC CYLINDER; PROCESS CONTROL; STICK SLIP FRICTION;

EID: 0345415469     PISSN: 13447653     EISSN: None     Source Type: Journal    
DOI: 10.1299/jsmec.46.1062     Document Type: Article

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