Three-dimensional profilometer for supersmooth surface

Optical Engineering

Volumn 42, Issue 10, 2003, Pages 3013-3016

  Wang, Yuanqing ^a  

^a NANJING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BIREFRINGENCE; FOCUSING; HELIUM NEON LASERS; LENSES; LIGHT INTERFERENCE; OPTICAL SYSTEMS; SURFACE TOPOGRAPHY; THREE DIMENSIONAL;

CALCITE BIREFRINGENCE; OBJECTIVE LENS; OPTICAL COMMON EJECTION EFFECT;

PROFILOMETRY;

EID: 0345377808     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1603758     Document Type: Article

References (5)

1. J. C. Wyant, C. L. Koliopoulos, B. Bhushan, and D. Basila, "Development of a three-dimensional noncontact digital optical profiler," J. Tribol. 108, 1-8 (Jan. 1986).
2. Z. Yongmuo, Y. Yongying, X. Min, and W. Yuanqing, "The double focus interference spherical profiler," Chin. J. Sci. Instrum. 16(3), 254-259 (1995).
3. W. Yuanqing, "Research on three-dimensional profiler for super-smooth surface," Appl. Laser 19(1), 21, 25-27 (1999).
4. B. Liu, L. Yang, J. Fan, and Z. Jian, "New 3D surface profile measurement based on phase-shift interfering technology," Proc. SPIE 3275, 15-18 (1998).
5. S.-M. Ryoo and T.-S. Choi, "A new approach to 3-D profilometry for the white light interferometric," IEICE Trans. Fundamentals E84-A(1), 378-382 (2001).