A new approach to 3-D profilometry for the white light interferometric (WLI)

IEICE Transactions on Fundamentals of Electronics, Communications and Computer Sciences

Volumn E84-A, Issue 1, 2001, Pages 378-382

  Ryoo, Seok Moon ^a   Cho, Tae Sun ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

Focus; Focus measure; Profilometry; Signal processing; White light interferometry

Indexed keywords

ALGORITHMS; FOCUSING; FUNCTIONS; INTERFEROMETERS; PHASE SHIFT; PROFILOMETRY; SIGNAL PROCESSING;

OPTICAL PATH DIFFERENCE (OPD); PHASE SHIFTING ALGORITHMS; WHITE LIGHT INTERFEROMETRY (WLI);

INTERFEROMETRY;

EID: 0035122938     PISSN: 09168508     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (4)

1. D. Malacara, et al., Interferogram analysis for optical testing, Marcel Press, 1998.
2. B. Bowe and V. Toal, "White light interferometric surface profiler," Opt. Eng., vol.37, no.G, 1998.
3. M. Subbarao and T.S. Choi, "Accurate recovery of threedimensional shape from image focus," IEEE TVans. Pattern Anal. Machine Intell-, vol.17, no.3, 1995.
4. Z. Ding, G. Wang, and Z. Wang, "Microscopic interferometer for surface roughness measurement," Opt. Eng., vol.35, no.10, PP.2956-29G1, 1996.