Fabrication and resonant behavior of PZT thick film cantilever for BioChip

Integrated Ferroelectrics

Volumn 50, Issue , 2002, Pages 11-20

  Kim, Hyung Joon ^a   Kim, Yong Bum ^b   Kang, Ji Yoon ^a   Kim, Tab Song ^a  

^a Korea Institute of Science and Technology   (South Korea)

^b Yonsei University   (South Korea)

Author keywords

Biochip; Cantilever; PZT; Thick film

Indexed keywords

DAMPING; LEAD; MICROPROCESSOR CHIPS; PIEZOELECTRIC DEVICES; RESONANCE;

BIOCHIPS; MASS DETECTION DEVICES; MICRO CANTILEVER DEVICES; THICK FILM CANTILEVERS;

THICK FILMS;

EID: 0345295535     PISSN: 10584587     EISSN: 16078489     Source Type: Journal    
DOI: 10.1080/743817676     Document Type: Article

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