Tomographic study of the three-dimensional distribution of a high-fluence implant in a polymer

Applied Physics A: Materials Science and Processing

Volumn 68, Issue 4, 1999, Pages 429-434

  Fink, D ^a   Muller M ^a   Ghosh, S ^a   Hnatowicz, V ^b   Vacik, J ^b  

^a HMI Berlin   (Germany)

^b NUCLEAR PHYSICS INSTITUTE   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRON TRANSPORT PROPERTIES; IRRADIATION; LITHIUM; NEUTRONS; POLYMETHYL METHACRYLATES; TOMOGRAPHY;

ELECTRONIC ENERGY TRANSFER DISTRIBUTION; HIGH FLUENCE IMPLANT; NEUTRON DEPTH PROFILING; THREE DIMENSIONAL DISTRIBUTION;

ION IMPLANTATION;

EID: 0345102429     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390050918     Document Type: Article

References (21)

1. J.P. Biersack, L.G. Haggmark: Nucl. Instrum. Methods 174, 257 (1980)
2. M. Müller, D. Fink: Nucl. Instrum. Methods B 34, 162 (1988)
3. D. Fink, M. Müller, L. Wang: J. Appl. Phys. 68, 958 (1990)
4. D. Fink, M. Müller: Surf. Coat. Technol. 51, 352 (1992)
5. E. Van Schie, J. Middlehoek, P. Zalm: Nucl. Instrum. Methods B 42. 109 (1989)
6. R. Günzler, M. Weiser, S. Kalbitzer: Nucl. Instrum. Methods B 62, 350 (1992)
7. S. Furukawa, H. Matsumura: Appl. Phys. Lett. 22, 97 (1973)
8. D. Fink, M. Müller, R. Klett, B. Shi, N. Cue, K. Wang: Nucl. Instrum. Methods B 135, 540 (1998)
9. D. Fink, M. Müller, R. Klett, J. Vacik, V. Hnatowicz, J. Cervenna: Nucl. Instrum. Methods B 103, 423 (1995)
10. D. Fink, M. Müller, R. Klett, B. Shi, N. Cue, K. Wang: Radiat. Eff. Defect. Solids 143, 33 (1997)
11. D. Fink, M. Müller, B. Shi, N. Cue, K. Wang: J. Trace Microprobe Techn. 16, 281 (1998)
12. M. Müller, D. Fink: Appl. Phys. A 61, 153 (1995)
13. M. Müller, D. Fink: work to be published (1998/99)
14. D. Fink, M. Müller, A. Schmoldt, J.K. Zhou, L.T. Chadderton, X.L. Xu: Nucl. Instrum. Methods B 65, 432 (1992)
15. D. Fink, M. Müller, S. Nakagawa, K. Hirata, B. Shi, K. Wang: Proc. of the 12th Intl. Conf. on "Ion Implantation Technology", Kyoto, 22.-26.6.1998
16. S. Koul: personal communication (1986)
17. J. Vacik, J. Cervena, V. Hnatowicz, V. Havranek. D. Fink: Acta Phys. Hung. 75, 369(1994)
18. D. Fink: "Neutron Depth Profiling", HMI B-539 (1996)
19. J.P. Biersack: Z. Phys. A 315, 95 (1982)
20. For recent descriptions of the diffusion simulation code "DIFF", see: D. Fink, M. Behar, J. Kaschny, R. Klett, L.T. Chadderton, V. Hnatowicz, J. Vacik, L. Wang: Appl. Phys. A 62, 359 (1996); D. Fink, R. Klett, M. Behar, G. Sanchez, J.R. Kaschny, W.G. Hertlein: Nucl. Instrum. Methods B 132, 660 (1997)
21. For recent descriptions of the diffusion simulation code "DIFF", see: D. Fink, M. Behar, J. Kaschny, R. Klett, L.T. Chadderton, V. Hnatowicz, J. Vacik, L. Wang: Appl. Phys. A 62, 359 (1996); D. Fink, R. Klett, M. Behar, G. Sanchez, J.R. Kaschny, W.G. Hertlein: Nucl. Instrum. Methods B 132, 660 (1997)