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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 132, Issue 4, 1997, Pages 660-670

Changes in the photoresist inhibitor distribution after ion irradiation and thermal treatment

(6) Fink, D a Klett, R a Behar, M b Sanchez G b,c Kaschny, J R b,d Hertlein, W G e

a HAHN MEITNER INSTITUT (Germany)

b FEDERAL UNIVERSITY OF RIO GRANDE DO SUL (Brazil)

c INSTITUTO DE FÍSICA ROSARIO (Argentina)

d INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH (Germany)

e SHIPLEY COMPANY (United States)

Author keywords

Diffusion; Ion irradiation; Photoresist; Polymers; Thermal annealing

Indexed keywords

ANNEALING; DIFFUSION; ION BEAMS; ION BOMBARDMENT; RADIATION DAMAGE; RADIATION EFFECTS; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

POSITIVE PHOTORESISTS;

PHOTORESISTS;

EID: 0031357747 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(97)00501-6 Document Type: Article

Times cited : (9)

References (13)

1
- 85033109659
- Shipley Europe Ltd., Swiss Office, Fluhstr. 30, CH-8640 Rapperswil, Switzerland
- Shipley Europe Ltd., Swiss Office, Fluhstr. 30, CH-8640 Rapperswil, Switzerland.

2
- 0010292424
- F.H. Dill, IEEE Transaction on Electron Devices ED-22 (1975) 7.
- (1975) IEEE Transaction on Electron Devices , vol.ED-22 , pp. 7
- Dill, F.H.¹

3
- 35949009769
- M. Behar, P.L. Grande, L. Amaral, J.R. Kaschny, F.C. Zawislak, R.B. Guimaraes, J.P. Biersack, D. Fink, Phys. Rev. B 41 (1990) 6145.
- (1990) Phys. Rev. B , vol.41 , pp. 6145
- Behar, M.¹ Grande, P.L.² Amaral, L.³ Kaschny, J.R.⁴ Zawislak, F.C.⁵ Guimaraes, R.B.⁶ Biersack, J.P.⁷ Fink, D.⁸

4
- 0000235265
- J.P. Biersack, L.G. Haggmark, Nucl. Instr. and Meth. 174 (1980) 257.
- (1980) Nucl. Instr. and Meth. , vol.174 , pp. 257
- Biersack, J.P.¹ Haggmark, L.G.²

5
- 0003412161
- J.F. Ziegler (Ed.), Pergamon Press, New York
- J.F. Ziegler, J.P. Biersak, U. Littmark, in: J.F. Ziegler (Ed.), Stopping and Ranges of Ions in Solids, vol. 1, Pergamon Press, New York, 1985.
- (1985) Stopping and Ranges of Ions in Solids , vol.1
- Ziegler, J.F.¹ Biersak, J.P.² Littmark, U.³

6
- 0004020231
- Clarendon Press. Oxford
- J. Crank, Mathematics of Diffusion, Clarendon Press. Oxford, 1970.
- (1970) Mathematics of Diffusion
- Crank, J.¹

7
- 4243201397
- F.S. Ham, J. Phys. Chem. Solids 6 (1958) 335.
- (1958) J. Phys. Chem. Solids , vol.6 , pp. 335
- Ham, F.S.¹

8
- 0003474751
- Cambridge University Press, Cambridge
- W.H. Press, S.A. Teukolsky, W.T. Vettering, B.P. Flannery, Numerical Recepies in FORTRAN, 2nd edition, Cambridge University Press, Cambridge, 1992/1993.
- (1992) Numerical Recepies in FORTRAN, 2nd Edition
- Press, W.H.¹ Teukolsky, S.A.² Vettering, W.T.³ Flannery, B.P.⁴

9
- 85033103593
- Ph. D. Thesis, Humboldt University, Berlin
- R. Klett, Ph. D. Thesis, Humboldt University, Berlin 1997.
- (1997)
- Klett, R.¹

10
- 0027579402
- V. Hnatowicz, V. Havranek, J. Kvitek, V. Perina, V. Svorcik, V. Rybka, Jpn. J. Appl. Phys. 32 (1993) 1810.
- (1993) Jpn. J. Appl. Phys. , vol.32 , pp. 1810
- Hnatowicz, V.¹ Havranek, V.² Kvitek, J.³ Perina, V.⁴ Svorcik, V.⁵ Rybka, V.⁶

11
- 0030287799
- D. Fink, R. Klett, M. Müller, H. Omichi, F. Hosoi, J. Vacik, V. Hnatowicz, L.T. Chadderton, Appl. Phys. A 63 (1996) 441-446.
- (1996) Appl. Phys. A , vol.63 , pp. 441-446
- Fink, D.¹ Klett, R.² Müller, M.³ Omichi, H.⁴ Hosoi, F.⁵ Vacik, J.⁶ Hnatowicz, V.⁷ Chadderton, L.T.⁸

12
- 0040174723
- D. Fink, H. Omichi, F. Hosoi, M. Tamada, V. Hnatowicz, H. Vacik, L.T. Chadderton, R. Klett, Trans. Mat. Res. Soc. Jpn. 17 (1994) 581.
- (1994) Trans. Mat. Res. Soc. Jpn. , vol.17 , pp. 581
- Fink, D.¹ Omichi, H.² Hosoi, F.³ Tamada, M.⁴ Hnatowicz, V.⁵ Vacik, H.⁶ Chadderton, L.T.⁷ Klett, R.⁸

13
- 0026849121
- D. Fink, V. Hnatowicz, J. Kvitek, V. Havranek, J.T. Zhou, Surf. Coat. Techn. 51 (1992) 57.
- (1992) Surf. Coat. Techn. , vol.51 , pp. 57
- Fink, D.¹ Hnatowicz, V.² Kvitek, J.³ Havranek, V.⁴ Zhou, J.T.⁵

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