Negative hydrogen ions produced by electron temperature control in an RF plasma

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 7 SUPPL. B, 1997, Pages 4551-4553

  Iizuka, Satoru ^a   Kato, Kohgi ^a   Takahashi, Akira ^a   Nakagomi, Koji ^a   Sato, Noriyoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Dissociative attachment; Electron temperature control; Negative hydrogen ions; Negative ions; RF plasma

Indexed keywords

HYDROGEN; IONS; PRESSURE EFFECTS; TEMPERATURE CONTROL;

ANIONS; ELECTRON TEMPERATURE CONTROL; GRID METHOD;

PLASMAS;

EID: 0031177264     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.4551     Document Type: Article

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