Fabrication Processes for 3D Periodic Nanostructures and Photonic Crystals

Optics InfoBase Conference Papers

Volumn , Issue , 1998, Pages 178-180

  Kawakami, Shojiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; NANOSTRUCTURES;

BIAS SPUTTERING; FABRICATION PROCESS; LAYER BY LAYER DEPOSITION; PATTERN FORMATION; PERIODIC NANOSTRUCTURE; PROCESS TECHNOLOGIES; REVIEW PROCESS; STATIONARY PATTERNS;

PHOTONIC CRYSTALS;

EID: 0344939123     PISSN: None     EISSN: 21622701     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. E. Yablonovitch, Phys. Rev. Lett, 58(20), pp. 2059-2062, 1987.
2. J. D. Joannopoulos et al., Photonic Crystals (Princeton Press, Princeton) 1995.
3. K. H. Guenther, Appl. Opt., 20(6), pp. 1034-1038, 1981.
4. S. Kawakami, Electron. Lett., 33(14), pp. 1260-1261, 1997.
5. S. Tazawa et al., IEEE Trans. Semiconduct. Manufact., 5(1), pp. 27-33, 1992.