Ion-shadow sputter for the production of STM tips

International Journal of the Japan Society for Precision Engineering

Volumn 33, Issue 3, 1999, Pages 215-217

  Arita, Masashi ^a   Takei, Ryutaro ^a   Yoshida, Masayuki ^a,b   Hamada, Kouichi ^a   Okada, Akira ^a   Mukasa, Köichi ^a   Takahashi, Heishichiro ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

^b TOSHIBA CORPORATION   (Japan)

Author keywords

Ion shadow sputter; Morphology; Scanning tunneling microscope; Silicon tip; Transmission electron microscopy

Indexed keywords

EID: 0344928181     PISSN: 0916782X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (14)

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