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Volumn 83, Issue 11, 1998, Pages 5670-5677

Plasma transport around dust agglomerates having complex shapes

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0344659266     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.367421     Document Type: Article
Times cited : (11)

References (9)
  • 1
    • 36149034135 scopus 로고
    • A collection of papers addressing particle transport in plasma processing reactors appears in a special issue of Plasma Sources Sci. Technol. 3, 239 (1994), and of the J. Vac. Sci. Techol. A 14, 489 (1996).
    • (1994) Plasma Sources Sci. Technol. , vol.3 , Issue.SPEC. ISSUE , pp. 239
  • 2
    • 3943080637 scopus 로고    scopus 로고
    • A collection of papers addressing particle transport in plasma processing reactors appears in a special issue of Plasma Sources Sci. Technol. 3, 239 (1994), and of the J. Vac. Sci. Techol. A 14, 489 (1996).
    • (1996) J. Vac. Sci. Techol. A , vol.14 , pp. 489
  • 6
    • 85034470624 scopus 로고    scopus 로고
    • CFD Research Corporation, Huntsville, AL
    • CFD Research Corporation, Huntsville, AL, http://www.cfdrc.com


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.