Ionic character of SrF2-B2O3-GeO2-SiO2 glasses for viscous flow and their applications to MOS capacitors

Applied Physics A: Materials Science and Processing

Volumn 62, Issue 4, 1996, Pages 313-315

  Kobayashi, K ^a   Mizushima, I ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; BORON COMPOUNDS; CAPACITANCE; CAPACITORS; GERMANIUM COMPOUNDS; MOS DEVICES; PASSIVATION; SILICA; STRONTIUM COMPOUNDS; VISCOUS FLOW;

CAPACITANCE VOLTAGE CHARACTERISTICS; HANNAY EQUATION; IONIC CHARACTER;

GLASS;

EID: 0030126270     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390050304     Document Type: Article

References (20)