Temperature effect on surface flatness of molecular beam epitaxy homoepitaxial layers grown on nominal and vicinal (111)B GaAs substrates

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 1, 1998, Pages 204-209

  Guerret Piecourt, Christelle ^a   Fontaine, Chantal ^a  

^a LAAS CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0344635617     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589780     Document Type: Article

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