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Volumn 10, Issue 8, 1998, Pages 2145-2151

Reactions of Cu(hfac)2 and Co2(CO)8 during Chemical Vapor Deposition of Copper-Cobalt Films

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EID: 0344575283     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm980031h     Document Type: Article
Times cited : (8)

References (29)
  • 2
    • 0542429378 scopus 로고    scopus 로고
    • IBM Develops Copper Memory Chip
    • Sept. 23
    • D. E. Kalish. IBM Develops Copper Memory Chip. The Detroit News Sept. 23, 1997.
    • (1997) The Detroit News
    • Kalish, D.E.1
  • 3
    • 0004004688 scopus 로고
    • Kodas, T. T., Hampden-Smith, M. J., Eds.; VCH: New York
    • Kodas, T. T.; Hampden-Smith, M. J. In The Chemistry of Metal CVD; Kodas, T. T., Hampden-Smith, M. J., Eds.; VCH: New York, 1994; pp 239-296.
    • (1994) The Chemistry of Metal CVD , pp. 239-296
    • Kodas, T.T.1    Hampden-Smith, M.J.2
  • 4
    • 0542405483 scopus 로고
    • Kodas, T. T., Hampden-Smith, M. J., Eds.; VCH; New York
    • Griffin, G. L.; Maverick, A. In The Chemistry of Metal CVD; Kodas, T. T., Hampden-Smith, M. J., Eds.; VCH; New York, 1994; pp 178-238.
    • (1994) The Chemistry of Metal CVD , pp. 178-238
    • Griffin, G.L.1    Maverick, A.2
  • 7
    • 0542381840 scopus 로고
    • Kodas, T. T., Hampden-Smith, M. J., Eds.; VCH: New York
    • Kodas, T. T.; Hampden-Smith, M. J. In The Chemistry of Metal CVD; Kodas, T. T., Hampden-Smith, M. J., Eds.; VCH: New York, 1994; pp 431-490.
    • (1994) The Chemistry of Metal CVD , pp. 431-490
    • Kodas, T.T.1    Hampden-Smith, M.J.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.